DSpace at KOASAS: Stress and Solution Chemistry Effects for Optimized CMP of Ultra-Low-k Dielectrics

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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Stress and Solution Chemistry Effects for Optimized CMP of Ultra-Low-k Dielectrics

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Kim, Taek-Soo researcher / Zhong, Q / Peterson, M / Tam, H / Konno, T / Dauskardt, R.H.

Publisher: Materials Research Society

Issue Date: 2008-03-24

Language: ENG

Citation: Materials Research Society 2008 Spring Meeting

URI: http://hdl.handle.net/10203/191037

Appears in Collection: ME-Conference Papers(학술회의논문)

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