Optically Selective Microlens Photomasks Using Self-Assembled Smectic Liquid Crystal Defect Arrays

Abstract

A photomask that combines two imaging elements (microlens arrays and clear windows) in one structure has been developed by using toric focal conic domain (TFCD) micro arrays of smectic liquid crystals. Their application as optically selective photomasks by simply adjusting (i) the illumination dose, (ii) the size of TFCD array mask, and (iii) the tone of photoresist (PR) is demonstrated (see figure).