Showing results 1 to 12 of 12
Fabrication and characterization of silicon-on-insulator wafers Kim, Taeyeong; Lee, Jungchul, MICRO AND NANO SYSTEMS LETTERS, v.11, no.1, 2023-11 |
Formation, evolution, and prevention of thermally induced defects on germanium and silicon upon high-temperature vacuum annealing Kim, Taeyeong; Jeong, Mungoung; Lee, Bong Jae; Lee, Jungchul, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.39, no.6, 2021-12 |
JMEMS Letters Thick Germanium-on-Nothing Structures by Annealing Microscale Hole Arrays With Straight Sidewall Profiles Jeong, Mun Goung; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.31, no.2, pp.183 - 185, 2022-04 |
Optimization of deep reactive ion etching for microscale silicon hole arrays with high aspect ratio Kim, Taeyeong; Lee, Jungchul, MICRO AND NANO SYSTEMS LETTERS, v.10, no.1, 2022-09 |
PCA-based sub-surface structure and defect analysis for germanium-on-nothing using nanoscale surface topography Jeong, Jaewoo; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, SCIENTIFIC REPORTS, v.12, no.1, 2022-05 |
Predicting Atomic Force Microscopy Topography from Optical Microscopes Using Deep Learning Jeong, Jaewoo; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, ADVANCED INTELLIGENT SYSTEMS, v.5, no.1, 2023-01 |
Self-assembled silicon membrane resonator for high vacuum pressure sensing Kim, Taeyeong; Ko, Juhee; Lee, Jungchul, VACUUM, v.201, 2022-07 |
Silicon nanoparticles: fabrication, characterization, application and perspectives Kim, Taeyeong; Lee, Jungchul, MICRO AND NANO SYSTEMS LETTERS, v.11, no.1, 2023-11 |
Simulation of Germanium-on-Nothing cavity’s morphological transformation using deep learning![]() Jeong, Jaewoo; Kim, Taeyeong; Lee, Jungchul, MICRO AND NANO SYSTEMS LETTERS, v.10, no.1, 2022-12 |
Soft and Deformable Sensors Based on Liquid Metals![]() Kim, Taeyeong; Kim, Dong-min; Lee, Bong Jae; Lee, Jungchul, SENSORS, v.19, no.19, 2019-10 |
Subsurface Imaging of Microfabricated Silicon Membrane-Cavity Structures Using Near-Infrared Interferometry Jeong, Mun Goung; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, ADVANCED ENGINEERING MATERIALS, v.24, no.10, 2022-10 |
Surrogate model for optimizing annealing duration of self-assembled membrane-cavity structures Jeong, Mun Goung; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, MICRO AND NANO SYSTEMS LETTERS, v.10, no.1, 2022-06 |
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