Self-assembled silicon membrane resonator for high vacuum pressure sensing

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In this paper, a mechanical vacuum gauge based on a circular membrane resonator is proposed and its high responsivity is verified in high vacuum down to a pressure of similar to 6 x 10(-7) mbar. A silicon-on-nothing (SON) resonator with a self-sealed cavity having a diameter of 150 mu m and a thickness of 1.55 mu m is fabricated through a high vacuum annealing process. After the fabricated membrane resonator is placed inside a custom vacuum chamber, its resonant characteristics are measured with a frequency sweep, and the vibration amplitudes are measured by resonance feedback using a laser and photodiodes at various vacuum pressures. Using quality factor (Q factor) measurement, the SON resonator shows a high responsivity (delta Q/delta P) of up to similar to 3.7 x 10(8 )mbar(-1) in the high vacuum range. Both quality factor and amplitude are found to be effective vacuum indicators, and amplitude measurement is specifically useful for real-time vacuum monitoring.
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Issue Date
2022-07
Language
English
Article Type
Article
Citation

VACUUM, v.201

ISSN
0042-207X
DOI
10.1016/j.vacuum.2022.111101
URI
http://hdl.handle.net/10203/296898
Appears in Collection
ME-Journal Papers(저널논문)
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