Browse "MS-Journal Papers(저널논문)" by Subject ECR plasma
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| Effect of activation of oxygen by electron cyclotron resonance plasma on the incorporation of Pb in the deposition of Pb(Zr,Ti)O-3 films by DC magnetron reactive sputtering Kim, ST; Kim, HH; Kim, YI; Lee, MY; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.36, no.9A, pp.5663 - 5669, 1997-09 |
| Effects of the deposition conditions of the seed layer on the crystallinity and electrical characteristics of the Pb(Zr,Ti)O-3 films Kim, ST; Kim, YL; Kim, HH; Lee, MY; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.37, no.5B, pp.594 - 596, 1998-05 |
| Investigation of Pt/Ti bottom electrodes for Pb(Zr,Ti)O-3 films Kim, ST; Kim, HH; Lee, MY; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.36, no.1A, pp.294 - 300, 1997-01 |
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