DSpace at KOASAS
College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Prediction of Wiggling Phenomenon in High Aspect Ratio Thin Film Structure During Etching Process through Buckling-Based Dimensional Analysis

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 44
  • Download : 0
Export
Song, Myoung / Jang, Kyung-Lim / Jung, Narae / Kim, Sungjin / Kim, Dae Sin / Kim, Taek-Sooresearcher
Publisher
The Korean Microelectronics and Packaging Society
Issue Date
2023-10-27
Language
English
Citation

The 21st International Symposium on Microelectronics and Packaging (ISMP)

URI
http://hdl.handle.net/10203/317413
Appears in Collection
ME-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Full Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0