Effect of channel defining layer on the vertical oxide TFTs for the application to the ultra high resolution display
We investigated the effect of back channel material which plays as a channel defining layer in vertical TFT for the application to the TFT of ultra-high resolution display. Although the IGZO vertical TFT with polyimide back channel has low mobility, it shows good on/off ratio higher than 107, low gate leakage current, and hard saturation behavior with channel length of 1 um.
- Publisher
- Blackwell Publishing Ltd
- Issue Date
- 2017-05
- Language
- English
- Citation
SID Symposium, Seminar, and Exhibition 2017, Display Week 2017, pp.389 - 392
- ISSN
- 0097-966X
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
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