In this paper, hysteresis compensation of the soft sensor is introduced by using approximated mechanical model. Soft force measurement unit which is made with three radially positioned air sacs embedded in the of silicone rubber is used for the measuring the hysteresis effect and modeling. Due to the viscoelasticity of silicone rubber and the air sac, this soft sensor can be modeled as three rigid plates with two springs and a damper between each plate and the floor. Transfer function from the input force to the output sensor value for each air sacs can be obtained with this simplified model. With physical properties of the soft force measurement unit and the assumptions of viscoelasticity material, coefficients for transfer function and the filter to cancel the dynamics of the materials can be calculated.