미세구조체의 휘어짐을 마음대로 조절할 수 있는 이중 전류도금 방법Dual-current Electroplating (DuCE) Method to Control a Deflection of a Suspended Micro-structure
- Publisher
- 마이크로나노시스템학회
- Issue Date
- 2013-04-05
- Language
- Korean
- Citation
제15회 한국MEMS학술대회, pp.225 - 226
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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