미세구조체의 휘어짐을 마음대로 조절할 수 있는 이중 전류도금 방법Dual-current Electroplating (DuCE) Method to Control a Deflection of a Suspended Micro-structure
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 양현호 | ko |
| dc.contributor.author | 한창훈 | ko |
| dc.contributor.author | 서민호 | ko |
| dc.contributor.author | 윤준보 | ko |
| dc.date.accessioned | 2019-04-15T22:32:51Z | - |
| dc.date.available | 2019-04-15T22:32:51Z | - |
| dc.date.created | 2013-06-26 | - |
| dc.date.issued | 2013-04-05 | - |
| dc.identifier.citation | 제15회 한국MEMS학술대회, pp.225 - 226 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/258825 | - |
| dc.language | Korean | - |
| dc.publisher | 마이크로나노시스템학회 | - |
| dc.title | 미세구조체의 휘어짐을 마음대로 조절할 수 있는 이중 전류도금 방법 | - |
| dc.title.alternative | Dual-current Electroplating (DuCE) Method to Control a Deflection of a Suspended Micro-structure | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 225 | - |
| dc.citation.endingpage | 226 | - |
| dc.citation.publicationname | 제15회 한국MEMS학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 제주도 | - |
| dc.contributor.localauthor | 윤준보 | - |
| dc.contributor.nonIdAuthor | 양현호 | - |
| dc.contributor.nonIdAuthor | 한창훈 | - |
| dc.contributor.nonIdAuthor | 서민호 | - |
- Appears in Collection
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