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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Novel linear motor for high precision stage of semiconductor lithography system

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M.G.Lee / K.H.Kim / Gweon, Dae-Gabresearcher
Issue Date
2002
Language
ENG
Citation

ASPE 2002 Anual meeting, pp.162 - 165

URI
http://hdl.handle.net/10203/24522
Appears in Collection
ME-Conference Papers(학술회의논문)
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