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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Novel linear motor for high precision stage of semiconductor lithography system

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dc.contributor.authorM.G.Lee-
dc.contributor.authorK.H.Kim-
dc.contributor.authorGweon, Dae-Gab-
dc.date.accessioned2011-07-08T06:52:33Z-
dc.date.available2011-07-08T06:52:33Z-
dc.date.created2012-02-06-
dc.date.issued2002-
dc.identifier.citationASPE 2002 Anual meeting, v., no., pp.162 - 165-
dc.identifier.urihttp://hdl.handle.net/10203/24522-
dc.languageENG-
dc.language.isoen_USen
dc.titleNovel linear motor for high precision stage of semiconductor lithography system-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage162-
dc.citation.endingpage165-
dc.citation.publicationnameASPE 2002 Anual meeting-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorM.G.Lee-
dc.contributor.nonIdAuthorK.H.Kim-
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ME-Conference Papers(학술회의논문)
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