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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Ultraprecision XY stage with millimeter travel range using leaf-spring mechanism and voice-coil motor

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Kang, D. W / Kim, D. M / Kim, K. H. / Shim, J. Y. / Gweon, Dae-Gabresearcher
Issue Date
2003-10-30
Language
ENG
Citation

ASPE 2003 Anual meeting

URI
http://hdl.handle.net/10203/24388
Appears in Collection
ME-Conference Papers(학술회의논문)
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