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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Ultraprecision XY stage with millimeter travel range using leaf-spring mechanism and voice-coil motor

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dc.contributor.authorKang, D. W-
dc.contributor.authorKim, D. M-
dc.contributor.authorKim, K. H.-
dc.contributor.authorShim, J. Y.-
dc.contributor.authorGweon, Dae-Gab-
dc.date.accessioned2011-07-04T05:57:08Z-
dc.date.available2011-07-04T05:57:08Z-
dc.date.created2012-02-06-
dc.date.issued2003-10-30-
dc.identifier.citationASPE 2003 Anual meeting, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/24388-
dc.languageENG-
dc.language.isoen_USen
dc.titleUltraprecision XY stage with millimeter travel range using leaf-spring mechanism and voice-coil motor-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameASPE 2003 Anual meeting-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorKang, D. W-
dc.contributor.nonIdAuthorKim, D. M-
dc.contributor.nonIdAuthorKim, K. H.-
dc.contributor.nonIdAuthorShim, J. Y.-
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ME-Conference Papers(학술회의논문)
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