NANOPOROUS MEMBRANE AND MANUFACTURING METHOD THEREOF나노 다공성 멤브레인 및 그 제작 방법

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In the present invention, a nanoporous membrane having a columnar structure is manufactured through a deposition technology used in a semiconductor process, and the size of a nanopore is adjusted by etching the lower surface of the manufactured nanoporous membrane or using a seed layer and a nanobead layer so that scaling up is available at a lowered process temperature and the size of the nanopore can be easily adjusted when manufacturing the nanoporous membrane having a columnar structure.
Assignee
KAIST
Country
US (United States)
Issue Date
2014-09-16
Application Date
2012-02-13
Application Number
13371838
Registration Date
2014-09-16
Registration Number
8834730
URI
http://hdl.handle.net/10203/229585
Appears in Collection
EE-Patent(특허)
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