NANOPOROUS MEMBRANE AND MANUFACTURING METHOD THEREOF나노 다공성 멤브레인 및 그 제작 방법
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Dae Sik | ko |
| dc.contributor.author | Yoon, Jun-Bo | ko |
| dc.contributor.author | Choi, Dong Hoon | ko |
| dc.contributor.author | Lee, Byung Kee | ko |
| dc.contributor.author | Jung, Moon Youn | ko |
| dc.contributor.author | Kim, Seung Hwan | ko |
| dc.date.accessioned | 2017-12-20T01:21:09Z | - |
| dc.date.available | 2017-12-20T01:21:09Z | - |
| dc.date.issued | 2014-09-16 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/229585 | - |
| dc.description.abstract | In the present invention, a nanoporous membrane having a columnar structure is manufactured through a deposition technology used in a semiconductor process, and the size of a nanopore is adjusted by etching the lower surface of the manufactured nanoporous membrane or using a seed layer and a nanobead layer so that scaling up is available at a lowered process temperature and the size of the nanopore can be easily adjusted when manufacturing the nanoporous membrane having a columnar structure. | - |
| dc.title | NANOPOROUS MEMBRANE AND MANUFACTURING METHOD THEREOF | - |
| dc.title.alternative | 나노 다공성 멤브레인 및 그 제작 방법 | - |
| dc.type | Patent | - |
| dc.type.rims | PAT | - |
| dc.contributor.localauthor | Yoon, Jun-Bo | - |
| dc.contributor.nonIdAuthor | Lee, Dae Sik | - |
| dc.contributor.nonIdAuthor | Choi, Dong Hoon | - |
| dc.contributor.nonIdAuthor | Lee, Byung Kee | - |
| dc.contributor.nonIdAuthor | Jung, Moon Youn | - |
| dc.contributor.nonIdAuthor | Kim, Seung Hwan | - |
| dc.contributor.assignee | KAIST | - |
| dc.identifier.iprsType | 특허 | - |
| dc.identifier.patentApplicationNumber | 13371838 | - |
| dc.identifier.patentRegistrationNumber | 8834730 | - |
| dc.date.application | 2012-02-13 | - |
| dc.date.registration | 2014-09-16 | - |
| dc.publisher.country | US | - |
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