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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Parylene을 이용한 Membrane 형태의 수직투과형 IR 광변조기 제작 및 특성 평가

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박창영 / 유장우 / 윤희선 / 조용철 / 박용화researcher / 나병훈 / 이상훈
Publisher
한국 MEMS
Issue Date
2014-04-05
Language
Korean
Citation

한국 MEMS 학술대회

URI
http://hdl.handle.net/10203/220362
Appears in Collection
ME-Conference Papers(학술회의논문)
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