Complementary Dual-Contact Switch Using Soft and Hard Contact Materials for Achieving Low Contact Resistance and High Reliability Simultaneously

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This paper reports a dual-contact microelectromechanical switch, which consists of two contacts in a single switch: one with a soft contact material and the other with a hard contact material to achieve low contact resistance and high reliability at the same time under hot switching conditions. In a single switching operation, the proposed dual-contact switch makes contact twice in sequence, where the first contact is made with a hard contact material (Pt-to-Pt) that can withstand an abrupt hot switching condition (high electric field or micro-arcing). The second contact is then accomplished with the soft contact material (Au-to-Au) that has low-contact resistance, through which most of the current flows. In contrast, when the switch releases contact, the Au-to-Au contact is initially detached, and this is followed by the release of the Pt-to-Pt contact. In this way, the dual-contact switch showed longer lifetime than that of a single Au-to-Au contact-only switch by up to fortyfold, and even better lifetime than that of a single Pt-to-Pt contact-only switch by more than two times in open laboratory environments (unpackaged). At the same time, contact resistance of the dual-contact switch was under 0.3 Omega at 50 V of the gate voltage, which is more than seven times smaller than that of the single Pt-to-Pt contact-only switch (2.2 Omega), due to the Au-to-Au contact sub-switch (the contact resistance of the single Au-to-Au contact-only switch was 0.36 Omega). [2012-0265]
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2013-08
Language
English
Article Type
Article
Keywords

MEMS RF SWITCH; POWER APPLICATIONS; LIFETIME; RELAYS; DESIGN; FORCE

Citation

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.22, no.4, pp.846 - 854

ISSN
1057-7157
DOI
10.1109/JMEMS.2013.2248125
URI
http://hdl.handle.net/10203/209384
Appears in Collection
EE-Journal Papers(저널논문)
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