Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints
- Publisher
- IEEE
- Issue Date
- 2013-08-17
- Language
- ENG
- Citation
9th IEEE International Conference on Automation Science and Engineering (IEEE CASE 2013), pp.856 - 861
- Appears in Collection
- IE-Conference Papers(학술회의논문)
- Files in This Item
- 78537.pdf(476.29 kB)Download
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