Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jin, Hong-Yue | - |
| dc.contributor.author | Morrison, James R | - |
| dc.date.accessioned | 2014-08-28T06:20:35Z | - |
| dc.date.available | 2014-08-28T06:20:35Z | - |
| dc.date.created | 2014-01-08 | - |
| dc.date.issued | 2013-08-17 | - |
| dc.identifier.citation | 9th IEEE International Conference on Automation Science and Engineering (IEEE CASE 2013), v., no., pp.856 - 861 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/188053 | - |
| dc.language | ENG | - |
| dc.publisher | IEEE | - |
| dc.title | Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 856 | - |
| dc.citation.endingpage | 861 | - |
| dc.citation.publicationname | 9th IEEE International Conference on Automation Science and Engineering (IEEE CASE 2013) | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.doi | 10.1109/CoASE.2013.6653901 | - |
| dc.contributor.localauthor | Morrison, James R | - |
| dc.contributor.nonIdAuthor | Jin, Hong-Yue | - |
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