Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Author KANG SANG WON
Showing results 1 to 15 of 15
| Focusing and Leveling System Using PSDs for the Wafer Steppers KANG SANG WON, SPIE997, 1994-01-01 |
| Plasma Enhanced Atomic Layer Deposition of SrTiO3 Thin Films Using Sr(DPM)2 and TTIP KANG SANG WON, 5th International AVS Conference on Microelectronics and Interfaces, pp.0 - 0, 2004-02-01 |
| Plasma Enhanced Atomic Layer Deposition of Ta-N films using TaF5 with N2/H2/Ar mixed gas plasma KANG SANG WON, 5th International AVS Conference on Microelectronics and Interfaces, pp.107 - 109, 2004-02-01 |
| Plasma Enhanced Atomic Layer Deposition of Ta-N films using TaF5 with N2/H2/Ar mixed gas plasma KANG SANG WON, Atomic Layer Deposition (ALD) 2004, pp.0 - 0, 2004-08-01 |
| Plasma-Enhanced ALD of Titanium-Silicon-Nitride Using TiCl4, SiH4, and N2/H2/Ar Plasma KANG SANG WON, Atomic Layer Deposition (ALD) 2002, 2002-01-01 |
| Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for the Application of Cu Diffusion Barrier KANG SANG WON, AVS 6th International Conference on Atomic Layer Deposition, pp.0 - 0, 2004-08-01 |
| Plasma-Enhanced Atomic Layer Deposition of TiAlN KANG SANG WON, 4th International AVS Conference on Microelectronics and Interfaces, pp.0 - 0, 2003-01-01 |
| Plasma-enhanced atomic layer deposition of TiN thin film using TiCl4 and N2/H2/Ar radicals KANG SANG WON, Atomic layer Deposition (ALD) 2002, 2002-01-01 |
| Selective Characterization & Complete Planarization of Plug with Aluminum by Cycle Chemical Vapor Deposition KANG SANG WON, The 4th International Conference on Electronic Materials Abstract Book, pp.105 -, 1998-01-01 |
| Ta2O5-SiO2 Nano- Laminated Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition KANG SANG WON, Atomic layer deposition (ALD) 2004, pp.0 - 0, 2004-08-01 |
| Tantalum Oxide Films grown by plasma enhanced atomic layer deposition KANG SANG WON, 2nd International AVS Conference on Microelectronics and Interfaces, 2001-01-01 |
| Tantalum Oxide Films Grown by Plasma-Enhanced Atomic Layer Deposition KANG SANG WON, The Second Asian Conference on Chemical Vapor Deposition, pp.190 - 193, 2001-01-01 |
| Titanium Dioxide Films Grown by Plasma-Enhanced Atomic Layer Deposition KANG SANG WON, 3rd International AVS Conference on Microelectronics and Interfaces, 2002-01-01 |
| 평면구조를 갖는 고성능 안티퓨즈 소자 제작 및 특성분석 KANG SANG WON, 한국반도체 대한전자공학회 학술대회37, 1994-01-01 |
| 평면형 구조 안티퓨즈 소자의 소자의 금속 도선 형성에 관한 연구 KANG SANG WON, 한국반도체 대한전자공학회 제2회 학술대회145, 1995-01-01 |
Discover
Open Access
Date issued
- 2,030 2020 - 2024
- 6,675 2010 - 2019
- 5,357 2000 - 2009
- 3,582 1990 - 1999
- 982 1980 - 1989