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Showing results 1 to 12 of 12

1
(A) study on the characteristics on TiN films deposited by PEALD using $TiCl_4$ = PEALD법으로 증착된 TiN 박막 특성에 관한 연구link

Kwon, Jung-Dae; 권정대; et al, 한국과학기술원, 2002

2
An Al plus Y coating process for improvement of the high-temperature oxidation resistance of a TiAl alloy

Jung, HG; Wee, Dang-Moon; Oh, MH; Kim, KY, OXIDATION OF METALS, v.55, no.3-4, pp.189 - 208, 2001-04

3
Chemical Consequences of Alkali Inhomogeneity in Cu2ZnSnS4 Thin-Film Solar Cells

Gershon, Talia; Hamann, Cayla; Hopstaken, Marinus; Lee, Yun Seog; Shin, Byungha; Haight, Richard, ADVANCED ENERGY MATERIALS, v.5, no.19, 2015-10

4
Co-sputter deposited Ta-Si diffusion barrier between Si and Cu: the effects of Si content on the barrier property

Lee, YJ; Suh, BS; Park, Chong-Ook, THIN SOLID FILMS, v.357, no.2, pp.237 - 241, 1999-12

5
Cu 확산방지용 TCP MOCVD Ta(Si)N 박막 증착 및 특성에 관한 연구 = Deposition and characterization of TCP MOCVD Ta(Si)N thin films as diffusion barrier for Culink

박혜련; Park, Hye-Lyun; et al, 한국과학기술원, 2002

6
Improved TiN film as a diffusion barrier between copper and silicon

Rha, SK; Lee, WJ; Lee, SY; Hwang, YS; Lee, YJ; Kim, DI; Kim, DW; et al, THIN SOLID FILMS, v.320, no.1, pp.134 - 140, 1998-05

7
MEMS 소자의 응용을 위한 실리콘 기판 위에 형성된 PZT 후막의 제조 및 평가 = Fabrication and characterization of the PZT thick film on Silicon substrate for MEMS applicationslink

전용배; Jeon, Yong-Bae; et al, 한국과학기술원, 2001

8
Oxygen diffusion through RuO2 bottom electrode of integrated ferroelectric capacitors

Ahn, JH; Lee, WJ; Kim, Ho Gi, MATERIALS LETTERS, v.38, no.4, pp.250 - 253, 1999-02

9
Structural and chemical stability of Ta-Si-N thin film between Si and Cu

Lee, YJ; Suh, BS; Rha, SK; Park, Chong-Ook, THIN SOLID FILMS, v.320, no.1, pp.141 - 146, 1998-05

10
Transformer coupled plasma enhanced metal organic chemical vapor deposition of Ta(Si)N thin films and their Cu diffusion barrier properties

Park, HL; Byun, KM; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.41, no.10, pp.6153 - 6164, 2002-10

11
YSZ 전해질과 diffusion barrier를 이용한 자동차용 NOx 센서에 대한 연구 = NOx sensor for the exhaust gas using YSZ electrolyte and porous YSZ diffusion barrierlink

박광철; Park, Kwang-Chol; et al, 한국과학기술원, 2005

12
원자층 증착법을 이용한 고효율 CIGS 태양전지용 $Zn_{1-x}Sn_xO$ 버퍼층 개발에 대한 연구 = Development of $Zn_{1-x}Sn_xO$ buffer layer for high efficient CIGS solar cells by atomic layer depositionlink

김선철; Kim, Suncheul; et al, 한국과학기술원, 2017

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