DSpace at KOASAS: Deep X-ray Lithography using Mask with Integrated Electrostatic and Electrothermal Actuators

DSpace at KOASAS

College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Deep X-ray Lithography using Mask with Integrated Electrostatic and Electrothermal Actuators

Cited 0 time in webofscience

Cited 0 time in scopus

Hit : 368
Download : 0

Export

Lee, Seung Seob researcher

Issue Date: 2012

Language: ENG

Citation: 5th Int. Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST’03)

URI: http://hdl.handle.net/10203/164892

Appears in Collection: ME-Conference Papers(학술회의논문)

Files in This Item: There are no files associated with this item.

Display Full Item Record

qr_code

트윗하기

KOASAS

Knowledge Service Development Team, KAIST 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea. T. 82-42-350-4493 Email. koasas@kaist.ac.kr
Copyright © 2016. Korea Advanced Institute of Science and Technology. All Rights Reserved.

KOASAS

KOASAS

Browse

Deep X-ray Lithography using Mask with Integrated Electrostatic and Electrothermal Actuators

KOASAS

Communities & Collections