DSpace at KOASAS: SU-8 removal method for an electroplated micro mechanical structure with a HAR SU-8 mold

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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

SU-8 removal method for an electroplated micro mechanical structure with a HAR SU-8 mold

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Lee, JS / Lee, Seung Seob researcher

Issue Date: 2008-06-22

Language: ENG

Citation: Asia-Pacific Conference on Transducers and Micro-Nano Technology

URI: http://hdl.handle.net/10203/158491

Appears in Collection: ME-Conference Papers(학술회의논문)

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SU-8 removal method for an electroplated micro mechanical structure with a HAR SU-8 mold

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