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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Development of Aerostatic Stage for Vacuum Environment The 1st International Conference on Positioning Technology

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Kim, Seung-Wooresearcher / Kim, K.H. / Lee, H.S.
Issue Date
2004
Language
ENG
Citation

The 1st International Conference on Positioning Technology, pp.477 - 478

URI
http://hdl.handle.net/10203/150729
Appears in Collection
ME-Conference Papers(학술회의논문)
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