Development of Aerostatic Stage for Vacuum Environment The 1st International Conference on Positioning Technology
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Seung-Woo | - |
| dc.contributor.author | Kim, K.H. | - |
| dc.contributor.author | Lee, H.S. | - |
| dc.date.accessioned | 2013-03-18T17:28:26Z | - |
| dc.date.available | 2013-03-18T17:28:26Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004 | - |
| dc.identifier.citation | The 1st International Conference on Positioning Technology, v., no., pp.477 - 478 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/150729 | - |
| dc.language | ENG | - |
| dc.title | Development of Aerostatic Stage for Vacuum Environment The 1st International Conference on Positioning Technology | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 477 | - |
| dc.citation.endingpage | 478 | - |
| dc.citation.publicationname | The 1st International Conference on Positioning Technology | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.contributor.localauthor | Kim, Seung-Woo | - |
| dc.contributor.nonIdAuthor | Kim, K.H. | - |
| dc.contributor.nonIdAuthor | Lee, H.S. | - |
- Appears in Collection
- ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.