길이 소급성을 갖는 AFM을 이용한 150 nm 피치 측정150 nm Pitch Measurement using Metrological AFM
- Publisher
- 한국정밀공학회
- Issue Date
- 2003-06
- Language
- KOR
- Citation
한국정밀공학회 춘계학술대회 , pp.264 - 267
- Appears in Collection
- ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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