길이 소급성을 갖는 AFM을 이용한 150 nm 피치 측정150 nm Pitch Measurement using Metrological AFM
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김승우 | - |
| dc.date.accessioned | 2013-03-18T09:04:25Z | - |
| dc.date.available | 2013-03-18T09:04:25Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2003-06 | - |
| dc.identifier.citation | 한국정밀공학회 춘계학술대회 , v., no., pp.264 - 267 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/146813 | - |
| dc.language | KOR | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | 길이 소급성을 갖는 AFM을 이용한 150 nm 피치 측정 | - |
| dc.title.alternative | 150 nm Pitch Measurement using Metrological AFM | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 264 | - |
| dc.citation.endingpage | 267 | - |
| dc.citation.publicationname | 한국정밀공학회 춘계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김승우 | - |
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