3D diffuser lithography: A novel method to fabricate various rounded microstructures
- Issue Date
- 2005-06-05
- Language
- ENG
- Citation
13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, v.2, pp.1457 - 1460
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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