3D diffuser lithography: A novel method to fabricate various rounded microstructures

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dc.contributor.authorChang, S.-I.-
dc.contributor.authorYoon, Jun-Bo-
dc.date.accessioned2013-03-17T02:50:51Z-
dc.date.available2013-03-17T02:50:51Z-
dc.date.created2012-02-06-
dc.date.issued2005-06-05-
dc.identifier.citation13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, v.2, no., pp.1457 - 1460-
dc.identifier.urihttp://hdl.handle.net/10203/139100-
dc.languageENG-
dc.title3D diffuser lithography: A novel method to fabricate various rounded microstructures-
dc.typeConference-
dc.identifier.scopusid2-s2.0-27544505355-
dc.type.rimsCONF-
dc.citation.volume2-
dc.citation.beginningpage1457-
dc.citation.endingpage1460-
dc.citation.publicationname13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorYoon, Jun-Bo-
dc.contributor.nonIdAuthorChang, S.-I.-
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EE-Conference Papers(학술회의논문)
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