DSpace at KOASAS: Optomechanical Pressure Sensors Using Multi-Mode Interference Couplers on Thin p+-Si Membranes

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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Optomechanical Pressure Sensors Using Multi-Mode Interference Couplers on Thin p+-Si Membranes

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Hong, Songcheol researcher / Hah, D / Yoon, E

Issue Date: 1999

Language: KOR

Citation: 제 6회 한국반도체 학술대회, pp.175 - 176

URI: http://hdl.handle.net/10203/132702

Appears in Collection: EE-Conference Papers(학술회의논문)

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