Optomechanical Pressure Sensors Using Multi-Mode Interference Couplers on Thin p+-Si Membranes
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hong, Songcheol | - |
| dc.contributor.author | Hah, D | - |
| dc.contributor.author | Yoon, E | - |
| dc.date.accessioned | 2013-03-16T15:37:10Z | - |
| dc.date.available | 2013-03-16T15:37:10Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999 | - |
| dc.identifier.citation | 제 6회 한국반도체 학술대회, v., no., pp.175 - 176 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/132702 | - |
| dc.language | KOR | - |
| dc.title | Optomechanical Pressure Sensors Using Multi-Mode Interference Couplers on Thin p+-Si Membranes | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 175 | - |
| dc.citation.endingpage | 176 | - |
| dc.citation.publicationname | 제 6회 한국반도체 학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Hong, Songcheol | - |
| dc.contributor.nonIdAuthor | Hah, D | - |
| dc.contributor.nonIdAuthor | Yoon, E | - |
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