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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Deep X-ray Mask Embedded in Electrostatic Actuator for 3-D LIGAProcess

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이광철 / 이성근 / 문상준 / 이승섭researcher
Issue Date
2001
Language
KOR
Citation

1st Intelligent Microsystem, pp.180 - 183

URI
http://hdl.handle.net/10203/129818
Appears in Collection
ME-Conference Papers(학술회의논문)
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