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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Deep X-ray Mask Embedded in Electrostatic Actuator for 3-D LIGAProcess

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dc.contributor.author이광철-
dc.contributor.author이성근-
dc.contributor.author문상준-
dc.contributor.author이승섭-
dc.date.accessioned2013-03-16T09:20:05Z-
dc.date.available2013-03-16T09:20:05Z-
dc.date.created2012-02-06-
dc.date.issued2001-
dc.identifier.citation1st Intelligent Microsystem, v., no., pp.180 - 183-
dc.identifier.urihttp://hdl.handle.net/10203/129818-
dc.languageKOR-
dc.titleDeep X-ray Mask Embedded in Electrostatic Actuator for 3-D LIGAProcess-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage180-
dc.citation.endingpage183-
dc.citation.publicationname1st Intelligent Microsystem-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor이승섭-
dc.contributor.nonIdAuthor이광철-
dc.contributor.nonIdAuthor이성근-
dc.contributor.nonIdAuthor문상준-
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ME-Conference Papers(학술회의논문)
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