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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Design and control of a precision three-axis stage for AFM scanner

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Gweon, Dae-Gabresearcher / Shim, J. Y. / Chung, H. W.
Publisher
ASPE
Issue Date
1998-10
Language
English
Citation

ASPE Annual Meeting, pp.457 - 461

URI
http://hdl.handle.net/10203/123429
Appears in Collection
ME-Conference Papers(학술회의논문)
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