Design and control of a precision three-axis stage for AFM scanner
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Gweon, Dae-Gab | ko |
| dc.contributor.author | Shim, J. Y. | ko |
| dc.contributor.author | Chung, H. W. | ko |
| dc.date.accessioned | 2013-03-15T20:12:05Z | - |
| dc.date.available | 2013-03-15T20:12:05Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-10 | - |
| dc.identifier.citation | ASPE Annual Meeting, pp.457 - 461 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/123429 | - |
| dc.language | English | - |
| dc.publisher | ASPE | - |
| dc.title | Design and control of a precision three-axis stage for AFM scanner | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000168480300111 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 457 | - |
| dc.citation.endingpage | 461 | - |
| dc.citation.publicationname | ASPE Annual Meeting | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | St. Louis | - |
| dc.contributor.localauthor | Gweon, Dae-Gab | - |
| dc.contributor.nonIdAuthor | Shim, J. Y. | - |
| dc.contributor.nonIdAuthor | Chung, H. W. | - |
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