A conventional route to scalable morphology-controlled regular structures and their superhydrophobic/hydrophilic properties for biochips application

Abstract

We use a conventional and straightforward route to fabricate scalable morphology-controlled regular structures. This route is based on the etching of PDMS microlens array in CF(4) and CF(4)/O(2) plasma. PDMS microlens array can be changed to regularly isolated microdot structures array in CF(4) plasma. Microbowl shaped structures array can be reached in CF(4)/O(2) plasma. Moreover, a set of structures after CF(4) plasma treatment display superhydrophobicity, while a set of structures after CF(4)/O(2) plasma treatment present hydrophilicity. DNA molecules can be readily enriched on the hydrophilic surface. We believe that the regular structure array surfaces provide a useful inspiration towards biomolecular detection and transportation in biochips.