Showing results 1 to 5 of 5
Characteristics of the Deposition Rate per Unit Power on Pulsed-DC Magnetron Sputtering Source An, Sang-Hyuk; In, Jung-Hwan; Chang, Hong-Young, PLASMA PROCESSES AND POLYMERS, v.6, no.12, pp.855 - 859, 2009-12 |
Development of multiple inductively coupled plasma sources using coaxial transmission line for large-area processes Lee, Jin-Won; An, Sang-Hyuk; Kim, J. H.; Lee, Yun-Seong; Chang, Hong-Young, CURRENT APPLIED PHYSICS, v.16, no.3, pp.415 - 420, 2016-03 |
Highly efficient emission from 2-D photonic crystal slab waveguide = 2차원 광결정 박막 도파로부터의 고효율 광방출에 대한 연구link An, Sang-Hyuk; 안상혁; et al, 한국과학기술원, 2006 |
On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes Lee, Jinwon; Lee, Yun-Seong; Chang, Hong-Young; An, Sang-Hyuk, PHYSICS OF PLASMAS, v.21, no.8, 2014-08 |
Parallelizability of helicon and inductively coupled plasma sources for large-area processing = 대면적 공정을 위한 헬리콘과 유도결합 플라즈마 소스의 평행화 연구link An, Sang-Hyuk; 안상혁; et al, 한국과학기술원, 2011 |
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