학위논문(박사) - 한국과학기술원 : 물리학과, 2011., [ vi, 60 p. ]
helicon; 플라즈마 소스; 플라즈마 공정; 대면적; 유도결합플라즈마; 헬리콘; inductively coupled plasma; large area; plasma processing; plasma source
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