Heuristics for Scheduling Wafer Lots at the Deposition Workstation in a Semiconductor Wafer Fab반도체 웨이퍼 팹의 흡착공정에서 웨이퍼 로트들의 스케쥴링 알고리듬

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 404
  • Download : 0
DC FieldValueLanguage
dc.contributor.author최성우ko
dc.contributor.author임태규ko
dc.contributor.author김영대ko
dc.date.accessioned2013-03-11T09:06:13Z-
dc.date.available2013-03-11T09:06:13Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2010-06-
dc.identifier.citation대한산업공학회지, v.36, no.2, pp.125 - 137-
dc.identifier.issn1225-0988-
dc.identifier.urihttp://hdl.handle.net/10203/98881-
dc.description.abstractThis study focuses on the problem of scheduling wafer lots of several product families in the deposition workstation in a semiconductor wafer fabrication facility. There are multiple identical parallel machines in the deposition workstation, and two types of setups, record-dependent setup and family setup, may be required at the deposition machines. A record-dependent setup is needed to find optimal operational conditions for a wafer lot on a machine, and a family setup is needed between processings of different families. We suggest two-phase heuristic algorithms in which a priority-rule-based scheduling algorithm is used to generate an initial schedule in the first phase and the schedule is improved in the second phase. Results of computational tests on randomly generated test problems show that the suggested algorithms outperform a scheduling method used in a real manufacturing system in terms of the sum of weighted flowtimes of the wafer lots.-
dc.languageEnglish-
dc.publisher대한산업공학회-
dc.titleHeuristics for Scheduling Wafer Lots at the Deposition Workstation in a Semiconductor Wafer Fab-
dc.title.alternative반도체 웨이퍼 팹의 흡착공정에서 웨이퍼 로트들의 스케쥴링 알고리듬-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume36-
dc.citation.issue2-
dc.citation.beginningpage125-
dc.citation.endingpage137-
dc.citation.publicationname대한산업공학회지-
dc.identifier.kciidART001446451-
dc.contributor.localauthor김영대-
dc.contributor.nonIdAuthor최성우-
dc.contributor.nonIdAuthor임태규-
dc.description.isOpenAccessN-
dc.subject.keywordAuthorScheduling-
dc.subject.keywordAuthorSemiconductor Wafer Fabrication-
dc.subject.keywordAuthorDeposition-
dc.subject.keywordAuthorHeuristics-
Appears in Collection
IE-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0