Equipment and Operations Automation in the Semiconductor Industry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Morrison, James R | ko |
| dc.contributor.author | Chien, CF | ko |
| dc.contributor.author | Dauzere-Peres, S | ko |
| dc.contributor.author | Dawande, M | ko |
| dc.contributor.author | Ding, H | ko |
| dc.contributor.author | Pettinato, JS | ko |
| dc.contributor.author | Yi, JG | ko |
| dc.date.accessioned | 2013-03-09T02:00:47Z | - |
| dc.date.available | 2013-03-09T02:00:47Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2011-01 | - |
| dc.identifier.citation | IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.8, no.1, pp.1 - 4 | - |
| dc.identifier.issn | 1545-5955 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/95062 | - |
| dc.language | English | - |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
| dc.title | Equipment and Operations Automation in the Semiconductor Industry | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000285843700001 | - |
| dc.identifier.scopusid | 2-s2.0-78651065371 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 8 | - |
| dc.citation.issue | 1 | - |
| dc.citation.beginningpage | 1 | - |
| dc.citation.endingpage | 4 | - |
| dc.citation.publicationname | IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING | - |
| dc.identifier.doi | 10.1109/TASE.2010.2078870 | - |
| dc.contributor.localauthor | Morrison, James R | - |
| dc.contributor.nonIdAuthor | Chien, CF | - |
| dc.contributor.nonIdAuthor | Dauzere-Peres, S | - |
| dc.contributor.nonIdAuthor | Dawande, M | - |
| dc.contributor.nonIdAuthor | Ding, H | - |
| dc.contributor.nonIdAuthor | Pettinato, JS | - |
| dc.contributor.nonIdAuthor | Yi, JG | - |
| dc.type.journalArticle | Editorial Material | - |
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