Chiral Nematic Fluids as Masks for Lithography

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A lithographic scheme is reported that uses a cholesteric liquid crystal with its helical axis in the plane of the sample as a "mask" for imprinting patterns in a photoresist over a large area. On the application of an electric field the cholesteric liquid crystals produce a texture that acts as a lattice of cylindrical lenses for one polarization of a light beam. This is used in photolithography to create parallel lines over large areas.
Publisher
WILEY-BLACKWELL
Issue Date
2012-01
Language
English
Article Type
Article
Keywords

DIFFRACTIVE-OPTICS FABRICATION; GRAY-SCALE MASKS; LIQUID-CRYSTALS; INSTABILITY; POLYMER; VOLTAGE; DNA

Citation

ADVANCED MATERIALS, v.24, no.3, pp.381 - +

ISSN
0935-9648
DOI
10.1002/adma.201103817
URI
http://hdl.handle.net/10203/93777
Appears in Collection
CBE-Journal Papers(저널논문)
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