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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Journal Papers(저널논문)

Chiral Nematic Fluids as Masks for Lithography

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dc.contributor.authorJeong, Hyeon-Suko
dc.contributor.authorKim, Yun-Hoko
dc.contributor.authorLee, Ji-Sunko
dc.contributor.authorKim, Jung-Hyunko
dc.contributor.authorSrinivasarao, Mohanko
dc.contributor.authorJung, Hee-Taeko
dc.date.accessioned2013-03-08T17:40:26Z-
dc.date.available2013-03-08T17:40:26Z-
dc.date.created2012-03-07-
dc.date.created2012-03-07-
dc.date.issued2012-01-
dc.identifier.citationADVANCED MATERIALS, v.24, no.3, pp.381 - +-
dc.identifier.issn0935-9648-
dc.identifier.urihttp://hdl.handle.net/10203/93777-
dc.description.abstractA lithographic scheme is reported that uses a cholesteric liquid crystal with its helical axis in the plane of the sample as a "mask" for imprinting patterns in a photoresist over a large area. On the application of an electric field the cholesteric liquid crystals produce a texture that acts as a lattice of cylindrical lenses for one polarization of a light beam. This is used in photolithography to create parallel lines over large areas.-
dc.languageEnglish-
dc.publisherWILEY-BLACKWELL-
dc.subjectDIFFRACTIVE-OPTICS FABRICATION-
dc.subjectGRAY-SCALE MASKS-
dc.subjectLIQUID-CRYSTALS-
dc.subjectINSTABILITY-
dc.subjectPOLYMER-
dc.subjectVOLTAGE-
dc.subjectDNA-
dc.titleChiral Nematic Fluids as Masks for Lithography-
dc.typeArticle-
dc.identifier.wosid000298945100009-
dc.identifier.scopusid2-s2.0-84862934298-
dc.type.rimsART-
dc.citation.volume24-
dc.citation.issue3-
dc.citation.beginningpage381-
dc.citation.endingpage+-
dc.citation.publicationnameADVANCED MATERIALS-
dc.identifier.doi10.1002/adma.201103817-
dc.contributor.localauthorJung, Hee-Tae-
dc.contributor.nonIdAuthorKim, Yun-Ho-
dc.contributor.nonIdAuthorSrinivasarao, Mohan-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorcholesteric liquid crystals-
dc.subject.keywordAuthorlithography-
dc.subject.keywordAuthorphotomasks-
dc.subject.keywordAuthorself-assembly-
dc.subject.keywordPlusDIFFRACTIVE-OPTICS FABRICATION-
dc.subject.keywordPlusGRAY-SCALE MASKS-
dc.subject.keywordPlusLIQUID-CRYSTALS-
dc.subject.keywordPlusINSTABILITY-
dc.subject.keywordPlusPOLYMER-
dc.subject.keywordPlusVOLTAGE-
dc.subject.keywordPlusDNA-
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