A Feasibility Study of Nano-grained ZnO Piezoelectric Thin Film Fabrication

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C-axis-oriented ZnO thin films were successfully deposited on p-Si (100) in an RF magnetron sputtering system. Deposition conditions such as deposition power, working pressure, and oxygen gas ratio were varied. Crystalline structures of the deposited ZnO films were investigated by a scanning electron microscope (SEM) technique. Results show that the deposition parameters can have a strong impact on the preferred orientations and grain sizes of the deposited ZnO films.
Publisher
한국정보통신학회
Issue Date
2009-12
Language
Korean
Citation

JOURNAL OF INFORMATION AND COMMUNICATION CONVERGENCE ENGINEERING, v.7, no.4, pp.530 - 534

ISSN
1738-0235
URI
http://hdl.handle.net/10203/93420
Appears in Collection
EE-Journal Papers(저널논문)
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