DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ruirui Zhang | ko |
dc.contributor.author | Lee, Eunju | ko |
dc.contributor.author | 윤기완 | ko |
dc.date.accessioned | 2013-03-08T15:30:47Z | - |
dc.date.available | 2013-03-08T15:30:47Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2009-12 | - |
dc.identifier.citation | JOURNAL OF INFORMATION AND COMMUNICATION CONVERGENCE ENGINEERING, v.7, no.4, pp.530 - 534 | - |
dc.identifier.issn | 1738-0235 | - |
dc.identifier.uri | http://hdl.handle.net/10203/93420 | - |
dc.description.abstract | C-axis-oriented ZnO thin films were successfully deposited on p-Si (100) in an RF magnetron sputtering system. Deposition conditions such as deposition power, working pressure, and oxygen gas ratio were varied. Crystalline structures of the deposited ZnO films were investigated by a scanning electron microscope (SEM) technique. Results show that the deposition parameters can have a strong impact on the preferred orientations and grain sizes of the deposited ZnO films. | - |
dc.language | Korean | - |
dc.publisher | 한국정보통신학회 | - |
dc.title | A Feasibility Study of Nano-grained ZnO Piezoelectric Thin Film Fabrication | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 7 | - |
dc.citation.issue | 4 | - |
dc.citation.beginningpage | 530 | - |
dc.citation.endingpage | 534 | - |
dc.citation.publicationname | JOURNAL OF INFORMATION AND COMMUNICATION CONVERGENCE ENGINEERING | - |
dc.identifier.kciid | ART001406740 | - |
dc.contributor.localauthor | 윤기완 | - |
dc.contributor.nonIdAuthor | Ruirui Zhang | - |
dc.subject.keywordAuthor | C-axis orientation | - |
dc.subject.keywordAuthor | Grain size | - |
dc.subject.keywordAuthor | RF Magnetron sputtering | - |
dc.subject.keywordAuthor | ZnO thin film. | - |
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