Proceedings of the international symposium on dry process - DPS 2005

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Publisher
ELSEVIER SCIENCE SA
Issue Date
2007-04
Language
English
Article Type
Editorial Material
Citation

THIN SOLID FILMS, v.515, no.12, pp.4843 - 4845

ISSN
0040-6090
DOI
10.1016/j.tsf.2006.10.014
URI
http://hdl.handle.net/10203/88486
Appears in Collection
PH-Journal Papers(저널논문)
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