DC Field | Value | Language |
---|---|---|
dc.contributor.author | Fujiwara, Nobuo | ko |
dc.contributor.author | Stamate, Eugen | ko |
dc.contributor.author | Yeom, Geun-Young | ko |
dc.contributor.author | Shiratani, Masaharu | ko |
dc.contributor.author | Chang, Hong-Young | ko |
dc.contributor.author | Economou, Demetre J. | ko |
dc.contributor.author | Kusano, Eiji | ko |
dc.contributor.author | Chang, Jane P. | ko |
dc.date.accessioned | 2013-03-06T21:15:59Z | - |
dc.date.available | 2013-03-06T21:15:59Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2007-04 | - |
dc.identifier.citation | THIN SOLID FILMS, v.515, no.12, pp.4843 - 4845 | - |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.uri | http://hdl.handle.net/10203/88486 | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.title | Proceedings of the international symposium on dry process - DPS 2005 | - |
dc.type | Article | - |
dc.identifier.wosid | 000245739600001 | - |
dc.identifier.scopusid | 2-s2.0-33947188019 | - |
dc.type.rims | ART | - |
dc.citation.volume | 515 | - |
dc.citation.issue | 12 | - |
dc.citation.beginningpage | 4843 | - |
dc.citation.endingpage | 4845 | - |
dc.citation.publicationname | THIN SOLID FILMS | - |
dc.identifier.doi | 10.1016/j.tsf.2006.10.014 | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | Fujiwara, Nobuo | - |
dc.contributor.nonIdAuthor | Stamate, Eugen | - |
dc.contributor.nonIdAuthor | Yeom, Geun-Young | - |
dc.contributor.nonIdAuthor | Shiratani, Masaharu | - |
dc.contributor.nonIdAuthor | Economou, Demetre J. | - |
dc.contributor.nonIdAuthor | Kusano, Eiji | - |
dc.contributor.nonIdAuthor | Chang, Jane P. | - |
dc.type.journalArticle | Editorial Material | - |
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