Virtual control - A virtual cluster tool for testing and verifying a cluster tool controller and a scheduler
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Joo, YJ | ko |
| dc.contributor.author | Lee, Tae-Eog | ko |
| dc.date.accessioned | 2008-09-22T09:32:10Z | - |
| dc.date.available | 2008-09-22T09:32:10Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004-09 | - |
| dc.identifier.citation | IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.3, pp.33 - 49 | - |
| dc.identifier.issn | 1070-9932 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/7389 | - |
| dc.description.abstract | A Virtual Cluster Tool for Testing and Verifying a Cluster Tool Controller and a Scheduler. | - |
| dc.language | English | - |
| dc.language.iso | en_US | en |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
| dc.subject | SYSTEMS | - |
| dc.subject | DESIGN | - |
| dc.title | Virtual control - A virtual cluster tool for testing and verifying a cluster tool controller and a scheduler | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000224038300006 | - |
| dc.identifier.scopusid | 2-s2.0-5144235344 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 11 | - |
| dc.citation.issue | 3 | - |
| dc.citation.beginningpage | 33 | - |
| dc.citation.endingpage | 49 | - |
| dc.citation.publicationname | IEEE ROBOTICS & AUTOMATION MAGAZINE | - |
| dc.embargo.liftdate | 9999-12-31 | - |
| dc.embargo.terms | 9999-12-31 | - |
| dc.contributor.localauthor | Lee, Tae-Eog | - |
| dc.contributor.nonIdAuthor | Joo, YJ | - |
| dc.type.journalArticle | Article | - |
| dc.subject.keywordAuthor | cluster tool | - |
| dc.subject.keywordAuthor | semiconductor manufacturing | - |
| dc.subject.keywordAuthor | control software | - |
| dc.subject.keywordAuthor | virtual model | - |
| dc.subject.keywordAuthor | verification | - |
| dc.subject.keywordPlus | SYSTEMS | - |
| dc.subject.keywordPlus | DESIGN | - |
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