고에너지 P이온 주입한 실리콘에 형성된 격자 결함에 관한 고분해능 투과전자현미경 연구A High-Resolution Transmission Electron Microscopy Study on the Lattice Defects Formed in the High Energy P Ion Implanted Silicon
- Publisher
- 한국세라믹학회
- Issue Date
- 1995-12
- Language
- Korean
- Citation
한국세라믹학회지, v.32, no.12, pp.1377 - 1382
- ISSN
- 1229-7801
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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