고에너지 P이온 주입한 실리콘에 형성된 격자 결함에 관한 고분해능 투과전자현미경 연구A High-Resolution Transmission Electron Microscopy Study on the Lattice Defects Formed in the High Energy P Ion Implanted Silicon
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 장기완 | ko |
| dc.contributor.author | 이정용 | ko |
| dc.contributor.author | 조남훈 | ko |
| dc.contributor.author | 노재상 | ko |
| dc.date.accessioned | 2013-03-02T13:55:31Z | - |
| dc.date.available | 2013-03-02T13:55:31Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-12 | - |
| dc.identifier.citation | 한국세라믹학회지, v.32, no.12, pp.1377 - 1382 | - |
| dc.identifier.issn | 1229-7801 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/73849 | - |
| dc.language | Korean | - |
| dc.publisher | 한국세라믹학회 | - |
| dc.title | 고에너지 P이온 주입한 실리콘에 형성된 격자 결함에 관한 고분해능 투과전자현미경 연구 | - |
| dc.title.alternative | A High-Resolution Transmission Electron Microscopy Study on the Lattice Defects Formed in the High Energy P Ion Implanted Silicon | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 32 | - |
| dc.citation.issue | 12 | - |
| dc.citation.beginningpage | 1377 | - |
| dc.citation.endingpage | 1382 | - |
| dc.citation.publicationname | 한국세라믹학회지 | - |
| dc.contributor.localauthor | 이정용 | - |
| dc.contributor.nonIdAuthor | 장기완 | - |
| dc.contributor.nonIdAuthor | 조남훈 | - |
| dc.contributor.nonIdAuthor | 노재상 | - |
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